The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Oct. 23, 2018

Filed:

Jul. 24, 2013
Applicant:

Gatan, Inc., Pleasanton, CA (US);

Inventors:

John Andrew Hunt, Fremont, CA (US);

Steven Thomas Coyle, Alameda, CA (US);

Michael Patrick Hassel-Shearer, Little Haseley, GB;

Assignee:

Gatan, Inc., Pleasonton, CA (US);

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H04N 7/18 (2006.01); H01J 5/02 (2006.01); H01J 37/08 (2006.01); H01J 37/30 (2006.01); H05B 6/00 (2006.01); G01N 23/00 (2006.01); G01N 21/88 (2006.01); G01N 1/32 (2006.01); H01L 21/66 (2006.01); G02B 21/00 (2006.01); H01J 37/305 (2006.01); G01N 23/2251 (2018.01); G01N 21/01 (2006.01); G01N 21/84 (2006.01);
U.S. Cl.
CPC ...
H04N 7/18 (2013.01); G01N 1/32 (2013.01); H01J 37/3005 (2013.01); H01J 37/3053 (2013.01); H01J 37/3056 (2013.01); H01L 22/26 (2013.01); G01N 23/2251 (2013.01); G01N 2021/0162 (2013.01); G01N 2021/8416 (2013.01); G02B 21/00 (2013.01); H01J 37/305 (2013.01); H01J 2237/184 (2013.01); H01J 2237/202 (2013.01); H01J 2237/31745 (2013.01);
Abstract

Disclosed are embodiments of an ion beam sample preparation apparatus and methods. The methods operate on a sample disposed in a vacuum chamber and include steps of directing an intensity-controllable, tilt-angle controllable ion beam at a sample holder coupled to a rotation stage. The methods further include illuminating and capturing one or more images of the sample, extracting useful features from one or more images and thereafter adjusting the sample preparation steps. Further methods are disclosed for capturing sequences of images, programmatically rotating images, and displaying sequences of images with similar rotation angles. Further methods include extracting useful features from sequences of images that may change with respect to time as ion beam preparation continues.


Find Patent Forward Citations

Loading…