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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 10109505 B1

PDFFull Text
Expired
Date of Patent:
Oct. 23, 2018

Filed:

Feb. 03, 2017

Dual medium filter for ion and particle filtering during semiconductor processing

Applicants:

International Business Machines Corporation, Armonk, NY (US);

Stmicroelectronics, Inc., Coppell, TX (US);

Inventors:

John H. Zhang, Fishkill, NY (US);

Laertis Economikos, Wappingers Falls, NY (US);

Adam Ticknor, Poughkeepsie, NY (US);

Wei-Tsu Tseng, Hopewell Junction, NY (US);

Assignee:

INTERNATIONAL BUSINESS MACHINES CORPORATION, Armonk, NY (US);

Attorneys:

Cantor Colburn LLP

Steven Meyers

Primary Examiner:

Joseph L Perrin

Assistant Examiner:

Kevin G Lee

Int. Cl.
CPC ...
H01L 21/67 (2006.01); B01D 15/36 (2006.01); B01D 24/00 (2006.01);
U.S. Cl.
CPC ...
H01L 21/67017 (2013.01); B01D 15/362 (2013.01); B01D 15/363 (2013.01); H01L 21/6704 (2013.01); B01D 24/002 (2013.01); B01D 2201/287 (2013.01); B01D 2221/14 (2013.01); B01D 2253/206 (2013.01);
Abstract

The present disclosure is directed to fluid filtering systems and methods for use during semiconductor processing. One or more embodiments are directed to fluid filtering systems and methods for filtering ions and particles from a fluid as the fluid is being provided to a semiconductor wafer processing tool, such as to a semiconductor wafer cleaning tool.

Find Patent Forward Citations

Zhang, John. (2018). Dual medium filter for ion and particle filtering during semiconductor processing (U.S. Patent No. 10109505). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/10109505

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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