The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 23, 2018
Filed:
Jun. 26, 2015
Plansee Composite Materials Gmbh, Lechbruck am See, DE;
Oerlikon Surface Solutiions Ag, Pfaeffikon, Pfaeffikon, CH;
Peter Polcik, Reutte, AT;
Sabine Woerle, Pflach, AT;
Siegfried Krassnitzer, Feldkirch, AT;
Juerg Hagmann, Sax, CH;
Plansee Composite Materials GmbH, Lechbruck am See, DE;
Oerlikon Surface Solutions AG, Pfaeffikon, Pfaeffikon, CH;
Abstract
A target, in particular a sputtering target, includes a target plate of a brittle material and a back plate. The back plate is connected to the target plate over an area and the target plate has micro cracks which pass through from the front side to the rear side of the target plate and divide the target plate into adjacent fragments. A process is also provided for producing such a target which is suitable, in particular, for the use of extremely high power densities. A vacuum coating process uses at least one such target as a sputtering target and as a result particularly high power densities can be used on the target during the sputtering.