The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 23, 2018
Filed:
Mar. 29, 2017
Applicant:
Canon Kabushiki Kaisha, Tokyo, JP;
Inventor:
Atsushi Takagi, Utsunomiya, JP;
Assignee:
CANON KABUSHIKI KAISHA, Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G03B 27/32 (2006.01); G03B 27/58 (2006.01); G03B 27/62 (2006.01); H02K 41/02 (2006.01); G03F 9/00 (2006.01); H01L 21/68 (2006.01); G03F 7/20 (2006.01);
U.S. Cl.
CPC ...
G03F 9/7011 (2013.01); G03F 7/70625 (2013.01); G03F 7/70725 (2013.01); G03F 9/7015 (2013.01); H01L 21/682 (2013.01);
Abstract
A lithography apparatus includes an original holder configured to hold and move an original, a measurement unit configured to measure a misalignment amount of the original with respect to the original holder, and a controller configured to control movement of the original holder. The controller repeatedly performs preliminary driving for moving the original holder before performing the pattern formation. At this time, if the misalignment amount measured by the measurement unit converges to a predetermined convergence value while the preliminary driving is repeatedly performed, the controller ends the preliminary driving.