The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 23, 2018
Filed:
Oct. 29, 2013
Applicant:
Mems-vision International Inc., Montreal, CA;
Inventors:
Assignee:
MEMS-Vision International Inc., Montreal, Quebec, CA;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 29/84 (2006.01); G01N 27/22 (2006.01); G01L 9/12 (2006.01); G01L 19/00 (2006.01);
U.S. Cl.
CPC ...
G01N 27/223 (2013.01); G01L 9/12 (2013.01); G01L 19/0092 (2013.01);
Abstract
Capacitive sensors and MEMS elements that can be implemented directly above silicon CMOS electronics are disclosed. A capacitive based sensor is disposed over a first predetermined portion of a wafer that includes at least a first ceramic element providing protection for the final capacitive based sensor and self-aligned processing during its manufacturing.