The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Oct. 23, 2018

Filed:

Jul. 24, 2015
Applicant:

Basf SE, Ludwigshafen, DE;

Inventors:

Julia Strautmann, Bad Laer, DE;

Rocco Paciello, Bad Duerkheim, DE;

Thomas Schaub, Neustadt, DE;

Kerstin Schierle-Arndt, Zwingenberg, DE;

Daniel Loeffler, Birkenheide, DE;

Hagen Wilmer, Ludwigshafen, DE;

Felix Eickemeyer, Heidelberg, DE;

Florian Blasberg, Frankfurt, DE;

Carolin Limburg, Mannheim, DE;

Assignee:

BASF SE, Ludwigshafen, DE;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C 16/06 (2006.01); C23C 16/18 (2006.01); C23C 16/455 (2006.01);
U.S. Cl.
CPC ...
C23C 16/18 (2013.01); C23C 16/45553 (2013.01);
Abstract

A process of bringing a compound of general formula (I) into the gaseous or aerosol state and depositing the compound of general formula (I) from the gaseous or aerosol state onto a solid substrate, wherein R, R, R, R, R, R, R, Rare independent of each other hydrogen, an alkyl group, an aryl group, or a trialkylsilyl group, R, R, R, Rare independent of each other an alkyl group, an aryl group, or a trialkylsilyl group, n is 1 or 2, M is a metal or semimetal, X is a ligand which coordinates M, and m is an integer from 0 to 3.


Find Patent Forward Citations

Loading…