The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Oct. 16, 2018

Filed:

May. 19, 2015
Applicant:

Satoshi Mizukami, Kanagawa, JP;

Inventor:

Satoshi Mizukami, Kanagawa, JP;

Assignee:

Ricoh Company, Ltd., Tokyo, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 41/187 (2006.01); H01L 41/047 (2006.01); H01L 41/257 (2013.01); B41J 2/16 (2006.01);
U.S. Cl.
CPC ...
H01L 41/1876 (2013.01); B41J 2/161 (2013.01); B41J 2/1628 (2013.01); B41J 2/1629 (2013.01); B41J 2/1631 (2013.01); B41J 2/1642 (2013.01); B41J 2/1645 (2013.01); B41J 2/1646 (2013.01); H01L 41/047 (2013.01); H01L 41/0477 (2013.01); H01L 41/257 (2013.01);
Abstract

An electro-mechanical transduction element includes a lower electrode formed above a substrate; an electro-mechanical transduction film which is formed on the lower electrode and includes a perovskite-type crystal containing lead zirconate titanate (PZT); and an upper electrode formed on the electro-mechanical transduction film, wherein, in a state where the electro-mechanical transduction film is not bound by the substrate, a peak position of X-ray diffraction caused by a plane (200) of the electro-mechanical transduction film is 2θ=44.45° or greater and 44.75° or smaller, and a peak of diffraction caused by the plane (200) or a plane (400) of the electro-mechanical transduction film has an asymmetry property.


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