The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 16, 2018
Filed:
May. 19, 2015
Applicant:
Nikon Corporation, Tokyo, JP;
Inventor:
Hiroyuki Hirota, Fukaya, JP;
Assignee:
NIKON CORPORATION, Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G03B 27/32 (2006.01); G03B 27/54 (2006.01); G03F 7/20 (2006.01); G02B 26/02 (2006.01);
U.S. Cl.
CPC ...
G03F 7/70116 (2013.01); G02B 26/02 (2013.01); G03F 7/70083 (2013.01); G03F 7/70158 (2013.01); G03F 7/70291 (2013.01);
Abstract
An illumination optical apparatus guides exposure light emitted from an exposure light source, to an illumination target object. The illumination optical apparatus has a plurality of spatial light modulation members arranged in an array form, and each spatial light modulation member is so configured that a plurality of reflecting optical elements each including a movable reflecting surface are arranged in an array form. At least one of the spatial light modulation members is arranged in an optical path of the light emitted from the light source.