The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 16, 2018
Filed:
Aug. 27, 2015
Tsi, Inc., Shoreview, MN (US);
Stanley L. Kaufman, New Brighton, MN (US);
David Y. H. Pui, Medina, MN (US);
Chang Hyuk Kim, Minneapolis, MN (US);
TSI, Incorporated, Shoreview, MN (US);
Abstract
A novel filter effectiveness detection method for AMCs (Airborne Molecular Contaminations) is provided herein, which is on-line, economical and applicable for diverse AMCs, using gas-to-particle conversion with soft X-ray irradiation radiation. In one embodiment, this method was conducted through AMC filter evaluations comparing two granular activated carbons (GACs), which are widely used AMC filter media, challenged with sulfur dioxide (SO), which is one of the major known AMCs in cleanrooms. Using this method, the concentration of gaseous SOwas assessed in terms of particle volume concentrations after the gas-to-particle conversion assisted by the soft X-ray irradiation. The results of this detection method showed high sensitivity to SO, down to parts per trillion-levels, which are levels that are too low to be detectable by currently available commercial gas sensors.