The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 16, 2018
Filed:
Jun. 03, 2016
Applicants:
The University of Tokyo, Bunkyo-ku, Tokyo, JP;
Nikon Corporation, Minato-ku, Tokyo, JP;
Inventors:
Takanori Ichiki, Tokyo, JP;
Masashi Kobayashi, Tokyo, JP;
Shotaro Terane, Tokyo, JP;
Kuno Suzuki, Iruma-gun, JP;
Assignees:
THE UNIVERSITY OF TOKYO, Tokyo, JP;
NIKON CORPORATION, Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B01L 99/00 (2010.01); B01L 3/00 (2006.01); F16K 7/12 (2006.01); F16K 7/17 (2006.01); B23P 15/00 (2006.01); F04B 43/02 (2006.01); F16K 99/00 (2006.01);
U.S. Cl.
CPC ...
F16K 7/12 (2013.01); B23P 15/001 (2013.01); F04B 43/021 (2013.01); F16K 7/126 (2013.01); F16K 7/17 (2013.01); F16K 99/0015 (2013.01); F16K 99/0059 (2013.01); F16K 2099/0078 (2013.01); F16K 2099/0094 (2013.01);
Abstract
A valve disposed at a flow path includes: a substrate having a first surface in which a hole having an opening section is formed; and a diaphragm member fixed to at least part of a wall surface of the hole and in which at least a central portion has a thin film shape, wherein a flow of a fluid in the flow path is controlled by deforming the diaphragm member.