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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 10099476 B1

PDFFull Text
Expired
Date of Patent:
Oct. 16, 2018

Filed:

Aug. 08, 2016

Piezoelectric thin film, method of manufacturing the same, piezoelectric thin film manufacturing apparatus and liquid ejection head

Applicant:

Canon Kabushiki Kaisha, Tokyo, JP;

Inventors:

Motokazu Kobayashi, Yokohama, JP;

Yoshinori Kotani, Yokohama, JP;

Naoyuki Koketsu, Tokyo, JP;

Assignee:

CANON KABUSHIKI KAISHA, Tokyo, JP;

Attorney:

Fitzpatrick, Cella, Harper & Scinto

Primary Examiner:

Erica Lin

Int. Cl.
CPC ...
B41J 2/045 (2006.01); B41J 2/14 (2006.01); H01L 41/08 (2006.01); B41J 2/16 (2006.01); H01L 41/187 (2006.01); H01L 41/317 (2013.01); H01L 41/314 (2013.01); H01L 41/09 (2006.01);
U.S. Cl.
CPC ...
B41J 2/14233 (2013.01); B41J 2/161 (2013.01); B41J 2/164 (2013.01); B41J 2/1642 (2013.01); B41J 2/1646 (2013.01); H01L 41/0805 (2013.01); H01L 41/1876 (2013.01); H01L 41/314 (2013.01); H01L 41/317 (2013.01); B41J 2002/1425 (2013.01); H01L 41/0973 (2013.01);
Abstract

A piezoelectric thin film is manufactured by sequentially executing: a step of coating a substrate by applying a coating solution containing an organic solvent and a piezoelectric thin film precursor to form a coating layer; a step of evaporating the organic solvent from the coating layer in a windless environment to obtain a dried coating layer containing the piezoelectric thin film precursor; and a step of heating the dried coating layer to form a piezoelectric thin film from the dried coating layer containing the piezoelectric thin film precursor.

Find Patent Forward Citations

Kobayashi, Motokazu. (2018). Piezoelectric thin film, method of manufacturing the same, piezoelectric thin film manufacturing apparatus and liquid ejection head (U.S. Patent No. 10099476). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/10099476

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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