The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 09, 2018
Filed:
Dec. 21, 2012
Applicant:
Snaptrack Inc., San Diego, CA (US);
Inventors:
Assignee:
SnapTrack, Inc., San Diego, CA (US);
Primary Examiner:
Int. Cl.
CPC ...
H01L 41/187 (2006.01); H03H 3/04 (2006.01); H01L 41/29 (2013.01); H01L 41/314 (2013.01); H01L 41/332 (2013.01); H03H 3/02 (2006.01); H03H 9/02 (2006.01); H03H 9/58 (2006.01);
U.S. Cl.
CPC ...
H03H 3/04 (2013.01); H01L 41/187 (2013.01); H01L 41/29 (2013.01); H01L 41/314 (2013.01); H01L 41/332 (2013.01); H03H 3/02 (2013.01); H03H 9/02015 (2013.01); H03H 9/589 (2013.01); H03H 2003/0435 (2013.01); H03H 2003/0471 (2013.01);
Abstract
A MEMS component includes a lower electrode. The MEMS component also includes an upper electrode. The upper electrode overlies the lower electrode. The MEMS component also includes a first piezoelectric layer between the lower electrode and the upper electrode. The first piezoelectric layer has a first piezoelectric material comprising AlN and Sc.