The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 09, 2018
Filed:
May. 27, 2017
Applicant:
Xiamen Sanan Optoelectronics Technology Co., Ltd., Xiamen, CN;
Inventors:
Sheng-wei Chou, Xiamen, CN;
Chang-cheng Chuo, Xiamen, CN;
Chan-chan Ling, Xiamen, CN;
Chia-hung Chang, Xiamen, CN;
Assignee:
XIAMEN SANAN OPTOELECTRONICS TECHNOLOGY CO., LTD., Xiamen, CN;
Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
H01L 33/00 (2010.01); H01L 33/48 (2010.01); H01L 27/15 (2006.01); H01L 33/46 (2010.01); H01L 33/04 (2010.01); H01L 33/10 (2010.01);
U.S. Cl.
CPC ...
H01L 33/48 (2013.01); H01L 27/15 (2013.01); H01L 33/04 (2013.01); H01L 33/10 (2013.01); H01L 33/46 (2013.01);
Abstract
A semiconductor element includes a super-lattice buffer layer including AlNlayers and AlOlayers (0<x<1, 0<y<1). The super-lattice buffer layer can mitigate corrosion to the side wall by chemical solution during chip fabrication, and improve chip yield. Fabrication the super-lattice buffer layer to achieve the effects can be realized, for example, using chemical vapor deposition (CVD).