The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Oct. 09, 2018

Filed:

Feb. 08, 2016
Applicant:

National University Corporation Nagoya University, Nagoya-shi, Aichi, JP;

Inventors:

Tadahiro Kawasaki, Nagoya, JP;

Takayoshi Tanji, Nagoya, JP;

Takashi Ikuta, Neyagawa, JP;

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01J 37/14 (2006.01); H01J 37/153 (2006.01); H01J 37/145 (2006.01);
U.S. Cl.
CPC ...
H01J 37/153 (2013.01); H01J 37/145 (2013.01);
Abstract

An electromagnetic lens for charged particle beam exhibits positive spherical aberration. A complicated combination of electromagnetic lenses had been necessary for correcting this spherical aberration. One of a circular aperture or a ring-shaped aperture is provided on an incident plate arranged on an incident side of charged particle beam, another of the circular aperture or the ring-shaped aperture is provided on a plate arranged on an emission side thereof, and a voltage is applied between the incident plate and the emission plate. By so doing, an electric field generated in the ring-shaped aperture emanates, which resolves the positive spherical aberration. The spherical aberration can be corrected by an extremely simple and easily implemented structure.


Find Patent Forward Citations

Kawasaki, Tadahiro. (2018). Spherical aberration corrector for electromagnetic lens for charged particle beam (U.S. Patent No. 10096448). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/10096448

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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