The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Oct. 09, 2018

Filed:

May. 09, 2017
Applicant:

Nikon Corporation, Tokyo, JP;

Inventor:

Yumiko Ouchi, Yokohama, JP;

Assignee:

NIKON CORPORATION, Tokyo, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G02B 21/14 (2006.01); G02B 21/00 (2006.01); G02B 21/36 (2006.01); H04N 5/225 (2006.01); G02B 6/27 (2006.01); G02B 6/28 (2006.01);
U.S. Cl.
CPC ...
G02B 21/0092 (2013.01); G02B 6/2706 (2013.01); G02B 21/14 (2013.01); G02B 21/367 (2013.01); H04N 5/2256 (2013.01); G02B 6/2848 (2013.01);
Abstract

An illumination optical system includes: a beam splitter located near a conjugate position of a specimen and configured to split beams from a light source into a plurality of groups of beams having different splitting directions around an optical axis; a beam selector configured to select and transmit one group of beams from the plurality of groups of beams and that is rotatable with respect to the optical axis; and a ½ wavelength plate located near the beam selector and rotatable about the optical axis. The rotation angles of the ½ wavelength plate and of the beam selector about the optical axis are respectively set so that the polarization direction of the beam which has passed through the ½ wavelength plate is perpendicular to the splitting direction of the one group of beams that has been selected by the beam selector and split by the beam splitter.


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