The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Oct. 09, 2018

Filed:

Aug. 25, 2016
Applicants:

Fuji Electric Co., Ltd., Kawasaki-shi, Kanagawa, JP;

National Institute of Advanced Industrial Science and Technology, Tokyo, JP;

Inventors:

Mitsuru Sometani, Tsukuba, JP;

Manabu Takei, Shiojiri, JP;

Shinsuke Harada, Tsukuba, JP;

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01R 31/26 (2014.01); H01L 21/66 (2006.01); H01L 29/16 (2006.01); H01L 29/165 (2006.01); H01L 29/20 (2006.01); H01L 29/78 (2006.01); H01L 29/10 (2006.01);
U.S. Cl.
CPC ...
G01R 31/26 (2013.01); G01R 31/2621 (2013.01); H01L 22/34 (2013.01); H01L 29/1602 (2013.01); H01L 29/165 (2013.01); H01L 29/1608 (2013.01); H01L 29/2003 (2013.01); H01L 29/7802 (2013.01); H01L 29/1087 (2013.01);
Abstract

A method of evaluating a semiconductor device having an insulated gate formed of a metal-oxide film semiconductor. The semiconductor device has a high potential side and a low potential side, and a threshold voltage that is a minimum voltage for forming a conducting path between the high and low potential sides. The method includes determining a variation of the threshold voltage at turn-on of the semiconductor device by continuously applying an alternating current (AC) voltage to the gate of the semiconductor device, a maximum voltage of the AC voltage being equal to or higher than the threshold voltage of the semiconductor device.


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