The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 09, 2018
Filed:
Jul. 29, 2015
National Institute of Advanced Industrial Science and Technology, Tokyo, JP;
Hajime Yoshida, Tsukuba, JP;
Abstract
Provided are: a vacuum gauge that, with a simple configuration, can accurately diagnose the degree of contamination of the vacuum gauge; and a contamination diagnosis method that, with a simple process, can accurately diagnose the degree of contamination of a vacuum gauge. Provided is a cold cathode ionization vacuum gauge that has a normal operation mode and a contamination diagnosis mode, the cold cathode ionization vacuum gauge comprising: an anodeand a cathodethat are for measuring vacuum pressure in the normal operation mode; an anodeand the cathodethat are for measuring the vacuum pressure in the contamination diagnosis mode; and a controllerthat compares the size of a current measured between the anodeand the cathodeand the size of a current measured between the anodeand the cathode
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