The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 09, 2018
Filed:
Feb. 27, 2015
Seiko Instruments Inc., Chiba-shi, Chiba, JP;
The University of Tokyo, Tokyo, JP;
Isao Shimoyama, Tokyo, JP;
Kiyoshi Matsumoto, Tokyo, JP;
Hidetoshi Takahashi, Tokyo, JP;
Minh-Dung Nguyen, Tokyo, JP;
Takeshi Uchiyama, Chiba, JP;
Manabu Oumi, Chiba, JP;
Yoko Shinohara, Chiba, JP;
Masayuki Suda, Chiba, JP;
SEIKO INSTRUMENTS INC., Chiba-shi, JP;
THE UNIVERSITY OF TOKYO, Tokyo, JP;
Abstract
A pressure sensor which detects variation in pressures, the pressure sensor including a cantilever which is bent according to a pressure difference between the inside and the outside of a cavity in a sensor main body, and an intra-lever gap which is formed on a proximal end portion of the cantilever. The proximal end portion is partitioned into a first support portion and a second support portion by an intra-lever gap in a second direction orthogonal to a first direction in which the proximal end portion and a distal end portion are connected to each other in plan view. A doped layer which is provided on a portion of the first and second support portions forms a first displacement detection portion and a second displacement detection portion. Lengths of the first and second displacement detection portions are shorter than those of the first and second supports along the second direction.