The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 09, 2018
Filed:
Apr. 29, 2015
Applicants:
Imec Vzw, Leuven, BE;
Katholieke Universiteit Leuven, Ku Leuven R&d, Leuven, BE;
Inventors:
Ivo Stassen, Leuven, BE;
Rob Ameloot, Diepenbeek, BE;
Dirk De Vos, Holsbeek, BE;
Philippe M. Vereecken, Luik, BE;
Assignees:
IMEC VZW, Leuven, BE;
Katholieke Universiteit Leuven, KU LEUVEN R&D, Leuven, BE;
Primary Examiner:
Int. Cl.
CPC ...
C23C 16/40 (2006.01); C23C 16/455 (2006.01); H01L 21/02 (2006.01); C23C 16/44 (2006.01);
U.S. Cl.
CPC ...
C23C 16/45553 (2013.01); C23C 16/407 (2013.01); C23C 16/4408 (2013.01); C23C 16/4554 (2013.01); C23C 16/45523 (2013.01); C23C 16/45527 (2013.01); H01L 21/0228 (2013.01); H01L 21/02172 (2013.01); H01L 21/02203 (2013.01); H01L 21/02271 (2013.01);
Abstract
A method of producing a metal-organic framework (MOF) film on a substrate is disclosed, the method comprising providing a substrate having a main surface and forming on said main surface a MOF film using an organometallic compound precursor and at least one organic ligand, wherein each of said organometallic compound precursor and said at least one organic ligand is provided only in vapour phase.