The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Oct. 09, 2018

Filed:

Jan. 29, 2016
Applicant:

Slt Technologies, Inc., Los Angeles, CA (US);

Inventors:

Douglas W. Pocius, Santa Barbara, CA (US);

Derrick S. Kamber, Goleta, CA (US);

Mark P. D'Evelyn, Santa Barbara, CA (US);

Jonathan D. Cook, Santa Barbara, CA (US);

Assignee:

SLT TECHNOLOGIES, INC., Los Angeles, CA (US);

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C 16/30 (2006.01); C23C 16/44 (2006.01); C30B 7/10 (2006.01); C30B 29/40 (2006.01); C23C 16/01 (2006.01); C01B 21/06 (2006.01);
U.S. Cl.
CPC ...
C23C 16/303 (2013.01); C01B 21/0632 (2013.01); C23C 16/01 (2013.01); C23C 16/4401 (2013.01); C30B 7/105 (2013.01); C30B 29/406 (2013.01); C01P 2004/60 (2013.01); C01P 2004/90 (2013.01); C01P 2006/80 (2013.01);
Abstract

A process of preparing polycrystalline group III nitride chunks comprising the steps of (a) placing a group III metal inside a source chamber; (b) flowing a halogen-containing gas over the group III metal to form a group III metal halide; (c) contacting the group III metal halide with a nitrogen-containing gas in a deposition chamber containing a foil, the foil comprising at least one of Mo, W, Ta, Pd, Pt, Ir, or Re; (d) forming a polycrystalline group III nitride layer on the foil within the deposition chamber; (e) removing the polycrystalline group III nitride layer from the foil; and (f) comminuting the polycrystalline group III nitride layer to form the polycrystalline group III nitride chunks, wherein the removing and the comminuting are performed in any order or simultaneously.


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