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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 10092929 B1

PDFFull Text
Date of Patent:
Oct. 09, 2018

Filed:

Dec. 21, 2016

Wafer tray sorter with door coupled to detector

Applicant:

Brooks Automation, Inc., Chelmsford, MA (US);

Inventors:

Anthony C. Bonora, Portola Valley, CA (US);

Brian Compian, Cupertino, CA (US);

Jeff P. Henderson, Campbell, CA (US);

Robert W. Carlson, Milpitas, CA (US);

Assignee:

Brooks Automation, Inc., Chelmsford, MA (US);

Attorney:

Martine Penilla Group, LLP

Primary Examiner:

Gerald McClain

Int. Cl.
CPC ...
H01L 21/677 (2006.01); B07C 5/34 (2006.01); B07C 5/00 (2006.01); B25J 15/00 (2006.01); B25J 15/02 (2006.01); H01L 21/67 (2006.01); H01L 21/687 (2006.01); G01N 35/04 (2006.01);
U.S. Cl.
CPC ...
B07C 5/3412 (2013.01); B07C 5/00 (2013.01); B25J 15/0028 (2013.01); B25J 15/022 (2013.01); G01N 35/04 (2013.01); H01L 21/67271 (2013.01); H01L 21/67721 (2013.01); H01L 21/67766 (2013.01); H01L 21/67772 (2013.01); H01L 21/67778 (2013.01); H01L 21/67781 (2013.01); H01L 21/68707 (2013.01); B07C 2501/0063 (2013.01); G01N 2035/0418 (2013.01); G01N 2035/0425 (2013.01);
Abstract

A tray engine includes a vertical drive column, a rotation mechanism for rotating the vertical drive column, and an end effector attached to the vertical drive column. The end effector includes an end effector base attached to the vertical drive column. The end effector further includes a slide attached to the end effector base to support a tray, when present. The slide enables the tray to slide along a length of the end effector base. The tray engine includes a drive mechanism attached to the end effector base for moving along the length of the end effector base to enable the tray, when present, to slide linearly along the length and load or unload the tray to or from the slide.

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