Pump having an automated gas removal and fluid recovery system and method using a gas removal reservoir having an internal partition

Abstract

A precision pump system having a motor driver for accurately and repeatedly delivering process fluid, (e.g., photo chemicals) using a pumping fluid with minimal process fluid loss to a fabrication process and whereby the motor driver can be easily and quickly replaced without interrupting the fluid flow path. This is accomplished with the use of a gas removal reservoir having at least one vertical partition therein and at least one free end near a top side of the gas removal reservoir where both the input and output to the gas removal reservoir are located on a bottom surface and a pumping fluid reservoir that are associated with the pump, either integrated with the pump or closely adjacent. In addition, this precision pump system can be remotely monitored, viewed and controlled over the Internet. In addition, trapped process fluid within a downstream filtering block can be recirculated to the gas removal reservoir when trapped gas in the filter is removed. Furthermore, a nitrogen gas source is connected to the gas removal reservoir via a valve in case a need to insert a gas is required. Alternative system embodiments are shown for recirculating process fluid back to the gas removal reservoir and/or the source line. Another alternative system has the pumping chamber coupled to the gas removal reservoir input.