The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 09, 2018
Filed:
May. 12, 2014
Smit Thermal Solutions B.v., Son en Breugel, NL;
Gerard Kaper, Waalre, NL;
Petrus Johannes Franciscus Diepens, Son, NL;
SMIT THERMAL SOLUTIONS B.V., Son, NL;
Abstract
Device for heating a substrate includes a process chamber having a first and a second sealable opening for a substrate to pass through, a first inlet for receiving a process gas and a first outlet for discharging an off-gas; an evaporator for evaporating the material, which evaporator device is connected to the chamber for supplying the process gas; a first condensation device connected to the chamber for receiving the off-gas and condensing the material in the vapour phase in the off-gas to form a solid phase and a second condensation device for condensing part of the material in vapour phase in the off-gas to form a liquid phase, which second condensation device connects the first condensation device to the discharge duct and a connecting duct between the evaporator device and the second condensation device for transporting material in the liquid phase between the second condensation device and the evaporator.