The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 02, 2018
Filed:
Aug. 04, 2015
Applicant:
Canon Kabushiki Kaisha, Tokyo, JP;
Inventors:
Shinan Wang, Komae, JP;
Yutaka Setomoto, Sagamihara, JP;
Assignee:
Canon Kabushiki Kaisha, Tokyo, JP;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01B 7/16 (2006.01); H02N 1/00 (2006.01); B06B 1/02 (2006.01); B81C 1/00 (2006.01); H01L 21/768 (2006.01); G01L 1/14 (2006.01); H01L 23/48 (2006.01);
U.S. Cl.
CPC ...
H02N 1/00 (2013.01); B06B 1/0292 (2013.01); B81C 1/00 (2013.01); B81C 1/00134 (2013.01); G01L 1/14 (2013.01); H01L 21/76898 (2013.01); H01L 23/481 (2013.01); B81C 1/00373 (2013.01); B81C 1/00611 (2013.01); H01L 21/76849 (2013.01); H01L 2924/0002 (2013.01);
Abstract
A capacitive transducer includes a substrate having a first surface and a second surface opposite the first surface, the substrate including a through wire extending therethrough between the first surface and the second surface, and a cell on the first surface, the cell including a first electrode and a second electrode spaced apart from the first electrode with a gap between the first electrode and the second electrode. Conductive protective films are disposed over surfaces of the through wire on the first surface side and the second surface side of the substrate.