The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Oct. 02, 2018

Filed:

Oct. 20, 2017
Applicant:

International Business Machines Corporation, Armonk, NY (US);

Inventors:

Russell A. Budd, North Salem, NY (US);

Mounir Meghelli, Tarrytown, NY (US);

Jason Scott Orcutt, Katonah, NY (US);

Jean-Olivier Plouchart, New York, NY (US);

Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
G02B 6/42 (2006.01); H01L 25/16 (2006.01); G02B 6/34 (2006.01); G02B 6/124 (2006.01); G02B 6/122 (2006.01); H01S 5/022 (2006.01); H01S 5/024 (2006.01); H01L 21/48 (2006.01); H01L 21/84 (2006.01); H01L 23/367 (2006.01); H01L 23/498 (2006.01); H01L 27/12 (2006.01); H01L 25/00 (2006.01); G02B 6/132 (2006.01); H01L 25/11 (2006.01); H01L 23/58 (2006.01); H01L 23/485 (2006.01); H01S 5/183 (2006.01); H01S 5/10 (2006.01); H01S 5/02 (2006.01); G02B 6/12 (2006.01); H01S 5/026 (2006.01);
U.S. Cl.
CPC ...
H01L 25/167 (2013.01); G02B 6/122 (2013.01); G02B 6/124 (2013.01); G02B 6/1221 (2013.01); G02B 6/132 (2013.01); G02B 6/34 (2013.01); G02B 6/4204 (2013.01); G02B 6/428 (2013.01); G02B 6/4214 (2013.01); G02B 6/4274 (2013.01); H01L 21/486 (2013.01); H01L 21/4853 (2013.01); H01L 21/84 (2013.01); H01L 23/367 (2013.01); H01L 23/3675 (2013.01); H01L 23/485 (2013.01); H01L 23/49827 (2013.01); H01L 23/49838 (2013.01); H01L 23/49894 (2013.01); H01L 23/585 (2013.01); H01L 25/117 (2013.01); H01L 25/50 (2013.01); H01L 27/1203 (2013.01); H01S 5/021 (2013.01); H01S 5/0215 (2013.01); H01S 5/02248 (2013.01); H01S 5/02272 (2013.01); H01S 5/02469 (2013.01); H01S 5/105 (2013.01); H01S 5/1838 (2013.01); H01S 5/18361 (2013.01); G02B 2006/12061 (2013.01); G02B 2006/12069 (2013.01); G02B 2006/12123 (2013.01); G02B 2006/12147 (2013.01); H01L 2223/58 (2013.01); H01L 2224/16225 (2013.01); H01L 2924/15311 (2013.01); H01S 5/026 (2013.01); H01S 5/1032 (2013.01); H01S 5/18341 (2013.01);
Abstract

Package structures and methods are provided to integrate optoelectronic and CMOS devices using SOI semiconductor substrates for photonics applications. For example, a package structure includes an integrated circuit (IC) chip, and an optoelectronics device and interposer mounted to the IC chip. The IC chip includes a SOI substrate having a buried oxide layer, an active silicon layer disposed adjacent to the buried oxide layer, and a BEOL structure formed over the active silicon layer. An optical waveguide structure is patterned from the active silicon layer of the IC chip. The optoelectronics device is mounted on the buried oxide layer in alignment with a portion of the optical waveguide structure to enable direct or adiabatic coupling between the optoelectronics device and the optical waveguide structure. The interposer is bonded to the BEOL structure, and includes at least one substrate having conductive vias and wiring to provide electrical connections to the BEOL structure.


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