The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 02, 2018
Filed:
Dec. 21, 2015
Applicant:
Fujitsu Limited, Kawasaki-shi, Kanagawa, JP;
Inventor:
Motonobu Sato, Isehara, JP;
Assignee:
FUJITSU LIMITED, Kawasaki, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 23/00 (2006.01); H01L 23/532 (2006.01); H01L 23/48 (2006.01); H01L 23/522 (2006.01); H01L 29/78 (2006.01); B82Y 10/00 (2011.01); H01L 29/772 (2006.01); H01L 29/41 (2006.01); H01L 21/768 (2006.01); H01L 23/485 (2006.01); H01L 25/065 (2006.01); H01L 29/06 (2006.01); H01L 29/16 (2006.01); C01B 32/16 (2017.01);
U.S. Cl.
CPC ...
H01L 23/53276 (2013.01); B82Y 10/00 (2013.01); H01L 21/76804 (2013.01); H01L 21/76879 (2013.01); H01L 21/76885 (2013.01); H01L 21/76898 (2013.01); H01L 23/481 (2013.01); H01L 23/485 (2013.01); H01L 23/522 (2013.01); H01L 23/5226 (2013.01); H01L 25/0657 (2013.01); H01L 29/413 (2013.01); H01L 29/772 (2013.01); H01L 29/78 (2013.01); C01B 32/16 (2017.08); C01B 2202/08 (2013.01); H01L 29/0676 (2013.01); H01L 29/1606 (2013.01); H01L 2221/1094 (2013.01); H01L 2225/06513 (2013.01); H01L 2225/06541 (2013.01); H01L 2924/0002 (2013.01);
Abstract
An opening is formed in an insulating film being a formation site, vertical and parallel CNTs are formed, tip portions of the CNTs are inserted into the opening, and the CNTs are removed except for the tip portions inserted into the opening. With this configuration, a desired conductive structure with high reliability is realized by forming high-quality CNTs in an opening of a formation site without depending on a base material.