The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 02, 2018
Filed:
Jul. 04, 2013
Central Glass Company, Limited, Ube-shi, Yamaguchi, JP;
Takashi Saio, Nabari, JP;
Soichi Kumon, Matsusaka, JP;
Masanori Saito, Matsusaka, JP;
Shinobu Arata, Matsusaka, JP;
Central Glass Company, Limited, Ube-shi, JP;
Abstract
A surface treatment was conducted by using a liquid chemical containing a water-repellent protective film forming agent represented by the following general formula [1], subsequent to a step of cleaning a metal-based wafer and prior to a step of drying the wafer. (Rrepresents a C-Cmonovalent hydrocarbon group the hydrogen elements of which may partially or entirely be replaced with a fluorine element(s). Rmutually independently represents a monovalent organic group having a C-Chydrocarbon group the hydrogen elements of which may partially or entirely be replaced with a fluorine element(s). 'a' is an integer of from 0 to 2.)