The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 02, 2018
Filed:
Sep. 10, 2013
Applicant:
Kobelco Research Institute, Inc., Kobe-shi, JP;
Inventors:
Assignee:
KOBELCO RESEARCH INSTITUTE, INC., Kobe-shi, JP;
Primary Examiner:
Int. Cl.
CPC ...
H01J 37/34 (2006.01); C23C 14/08 (2006.01); C23C 14/34 (2006.01); C04B 35/457 (2006.01); C04B 35/01 (2006.01); C04B 35/453 (2006.01); C04B 35/64 (2006.01); H01L 21/02 (2006.01);
U.S. Cl.
CPC ...
H01J 37/3429 (2013.01); C04B 35/01 (2013.01); C04B 35/453 (2013.01); C04B 35/457 (2013.01); C04B 35/64 (2013.01); C23C 14/08 (2013.01); C23C 14/086 (2013.01); C23C 14/3414 (2013.01); H01J 37/3491 (2013.01); C04B 2235/3286 (2013.01); C04B 2235/3293 (2013.01); C04B 2235/658 (2013.01); C04B 2235/6562 (2013.01); C04B 2235/66 (2013.01); C04B 2235/763 (2013.01); C04B 2235/77 (2013.01); C04B 2235/786 (2013.01); C04B 2235/80 (2013.01); H01L 21/02554 (2013.01); H01L 21/02565 (2013.01); H01L 21/02631 (2013.01);
Abstract
An oxide sintered body which is obtained by mixing and sintering zinc oxide, indium oxide, gallium oxide and tin oxide. The relative density of the oxide sintered body is 85% or more and the average grain size of crystal grains observed on the surface of the oxide sintered body is less than 10 μm. X-ray diffraction of the oxide sintered body shows that a ZnSnOphase and an InGaZnOphase are the main phases and that an InGaZnOphase is contained in an amount of 3 volume % or less.