The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 02, 2018
Filed:
Jun. 29, 2015
Applicant:
Hitachi High-tech Science Corporation, Tokyo, JP;
Inventors:
Atsushi Uemoto, Tokyo, JP;
Tatsuya Asahata, Tokyo, JP;
Makoto Sato, Tokyo, JP;
Yo Yamamoto, Tokyo, JP;
Assignee:
Hitachi High-Tech Science Corporation, Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01J 37/31 (2006.01); G01N 1/44 (2006.01); H01J 37/317 (2006.01);
U.S. Cl.
CPC ...
G01N 1/44 (2013.01); H01J 37/31 (2013.01); H01J 37/317 (2013.01);
Abstract
A charged particle beam device () includes a computer () which controls multiple charged particle beam irradiation optical systems, the needle (), and a gas supply portion () to transfer a sample piece Q to a predetermined position of the sample piece holder P, based on at least images of a sample piece holder (P), a needle (), and the sample piece (Q) previously acquired by multiple charged particle beams.