The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Oct. 02, 2018

Filed:

Jul. 05, 2017
Applicants:

Nec Corporation, Tokyo, JP;

Photonics Electronics Technology Research Association, Tokyo, JP;

Inventor:

Masatoshi Tokushima, Tokyo, JP;

Assignees:

NEC CORPORATION, Minato-ku, Tokyo, JP;

PHOTONICS ELECTRONICS TECHNOLOGY RESEARCH ASSOCIATION, Bunkyo-ku, Tokyo, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01B 11/00 (2006.01); G01B 11/14 (2006.01); G01B 11/27 (2006.01); G03F 9/00 (2006.01);
U.S. Cl.
CPC ...
G01B 11/14 (2013.01); G01B 11/272 (2013.01); G03F 9/70 (2013.01);
Abstract

An alignment optical measurement element includes a grating coupler, and a reflector coupled to the grating coupler. The alignment optical measurement element is arranged so that: the grating coupler diffracts an incident light in a first direction into a first diffracted light to propagate the first diffracted light as a first propagating light in a second direction, the reflector reflects the first propagating light into a second propagating light in a third direction opposite to the second direction; and the grating coupler diffracts the second propagating light into a second diffracted light to emit the second diffracted light as an emitted light in a fourth direction opposite to the first direction.


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