The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 02, 2018
Filed:
May. 15, 2017
Applicant:
Lam Research Corporation, Fremont, CA (US);
Inventors:
Joshua Collins, Sunnyvale, CA (US);
Eric H. Lenz, Livermore, CA (US);
Michal Danek, Cupertino, CA (US);
Assignee:
Lam Research Corporation, Fremont, CA (US);
Primary Examiner:
Int. Cl.
CPC ...
C23C 16/448 (2006.01); C23C 16/455 (2006.01); C23C 16/52 (2006.01);
U.S. Cl.
CPC ...
C23C 16/4481 (2013.01); C23C 16/448 (2013.01); C23C 16/45502 (2013.01); C23C 16/45512 (2013.01); C23C 16/45544 (2013.01); C23C 16/45561 (2013.01); C23C 16/45574 (2013.01); C23C 16/52 (2013.01);
Abstract
A vaporizer system is provided that allows for rapid shifts in the flow rate of a vaporized reactant while maintaining a constant overall flow rate of vaporized reactant and carrier gas.