The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 02, 2018
Filed:
Apr. 08, 2015
Applicant:
Sumitomo Electric Industries, Ltd., Osaka-shi, JP;
Inventors:
Miki Miyanaga, Itami, JP;
Kenichi Watatani, Itami, JP;
Koichi Sogabe, Itami, JP;
Hideaki Awata, Itami, JP;
Kenichi Kurisu, Itami, JP;
Assignee:
Sumitomo Electric Industries, Ltd., Osaka-shi, JP;
Primary Examiner:
Int. Cl.
CPC ...
H01B 1/08 (2006.01); C23C 14/00 (2006.01); C23C 14/34 (2006.01); C04B 35/495 (2006.01); C04B 35/622 (2006.01); C23C 14/08 (2006.01); H01J 37/34 (2006.01); H01L 21/02 (2006.01); H01L 29/66 (2006.01); H01L 29/786 (2006.01); C04B 35/00 (2006.01);
U.S. Cl.
CPC ...
C23C 14/3414 (2013.01); C04B 35/00 (2013.01); C04B 35/495 (2013.01); C04B 35/62218 (2013.01); C23C 14/083 (2013.01); C23C 14/086 (2013.01); C23C 14/34 (2013.01); H01B 1/08 (2013.01); H01J 37/3429 (2013.01); H01L 21/02565 (2013.01); H01L 21/02631 (2013.01); H01L 29/66969 (2013.01); H01L 29/786 (2013.01); H01L 29/7869 (2013.01); C04B 2235/326 (2013.01); C04B 2235/3284 (2013.01); C04B 2235/3286 (2013.01); C04B 2235/3293 (2013.01);
Abstract
There is provided an oxide sintered body including indium, tungsten, and at least one of zinc and tin, wherein the oxide sintered body includes, as a crystal phase, a complex oxide crystal phase including tungsten and at least one of zinc and tin. There is also provided a semiconductor device including an oxide semiconductor film formed by a sputtering method by using the oxide sintered body as a target.