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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 10087517 B1

PDFFull Text
Date of Patent:
Oct. 02, 2018

Filed:

Apr. 08, 2015

Oxide sintered body and semiconductor device

Applicant:

Sumitomo Electric Industries, Ltd., Osaka-shi, JP;

Inventors:

Miki Miyanaga, Itami, JP;

Kenichi Watatani, Itami, JP;

Koichi Sogabe, Itami, JP;

Hideaki Awata, Itami, JP;

Kenichi Kurisu, Itami, JP;

Assignee:

Sumitomo Electric Industries, Ltd., Osaka-shi, JP;

Attorneys:

Venable LLP

Michael A. Sartori

Kerri M. Patterson

Primary Examiner:

Mark Kopec

Int. Cl.
CPC ...
H01B 1/08 (2006.01); C23C 14/00 (2006.01); C23C 14/34 (2006.01); C04B 35/495 (2006.01); C04B 35/622 (2006.01); C23C 14/08 (2006.01); H01J 37/34 (2006.01); H01L 21/02 (2006.01); H01L 29/66 (2006.01); H01L 29/786 (2006.01); C04B 35/00 (2006.01);
U.S. Cl.
CPC ...
C23C 14/3414 (2013.01); C04B 35/00 (2013.01); C04B 35/495 (2013.01); C04B 35/62218 (2013.01); C23C 14/083 (2013.01); C23C 14/086 (2013.01); C23C 14/34 (2013.01); H01B 1/08 (2013.01); H01J 37/3429 (2013.01); H01L 21/02565 (2013.01); H01L 21/02631 (2013.01); H01L 29/66969 (2013.01); H01L 29/786 (2013.01); H01L 29/7869 (2013.01); C04B 2235/326 (2013.01); C04B 2235/3284 (2013.01); C04B 2235/3286 (2013.01); C04B 2235/3293 (2013.01);
Abstract

There is provided an oxide sintered body including indium, tungsten, and at least one of zinc and tin, wherein the oxide sintered body includes, as a crystal phase, a complex oxide crystal phase including tungsten and at least one of zinc and tin. There is also provided a semiconductor device including an oxide semiconductor film formed by a sputtering method by using the oxide sintered body as a target.

Find Patent Forward Citations

Miyanaga, Miki. (2018). Oxide sintered body and semiconductor device (U.S. Patent No. 10087517). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/10087517

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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