The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 02, 2018
Filed:
Sep. 23, 2016
Shin-etsu Chemical Co., Ltd., Tokyo, JP;
Yusuke Kashiwagi, Ibaraki, JP;
Tetsuya Otosaka, Ibaraki, JP;
Shin-Etsu Chemical Co., Ltd., Tokyo, JP;
Abstract
To prevent a lowering of gripping force due to temperature changes, provided is a gripping mechanism including a plurality of chuck claws that, when having come close to each other, generate a gripping force on a gripped body; a chuck body that holds the plurality of chuck claws on a common planar surface, and moves them on the planar surface; and a plurality of chuck plates that, when each of the plurality of chuck claws grips the gripped body, are interposed between each of the plurality of chuck claws and the gripped body. A thermal expansion coefficient αof the plurality of chuck claws, a thermal expansion coefficient αof the plurality of chuck plates and a thermal expansion coefficient αof the gripped body have a relationship indicated byα<α<α  (Equation 1).
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile