The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 02, 2018
Filed:
Jun. 12, 2015
Canon Kabushiki Kaisha, Tokyo, JP;
Yoshihiro Hasegawa, Tama, JP;
Canon Kabushiki Kaisha, Tokyo, JP;
Abstract
In a method for producing a capacitive micromachined ultrasonic transducer having a cell of a structure having a first electrode and a vibration membrane containing a second electrode provided with a cavity interposed between the first electrode and the second electrode, a first sacrificial layer is formed on the first electrode. A second sacrificial layer is formed on a portion corresponding to a part of a cavity is formed on the first sacrificial layer, and then an insulating layer configuring a part of the vibration membrane is formed on the second sacrificial layer. The second sacrificial layer is removed by etching through an opening formed in the insulating layer, and then a part of the first sacrificial layer is removed.