The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 25, 2018
Filed:
Aug. 28, 2014
Horiba Stec, Co., Ltd., Kyoto-shi, Kyoto, JP;
Kotaro Takijiri, Kyoto, JP;
Keita Shimizu, Kyoto, JP;
HORIBA STEC, Co., Ltd., Kyoto-shi, Kyoto, JP;
Abstract
A flow-rate control unit is constituted by a sensor model storage unit, a flow-rate simulation value output unit that outputs a flow-rate simulation value which is a flow-rate value that the sensor model outputs when a flow-rate setting value is input, a feedback control unit that outputs a flow-rate feedback value based on a deviation between a flow-rate measurement value and the flow-rate simulation value, and a valve control unit that controls a valve application voltage that is applied to a valve based on the flow-rate feedback value and a flow-rate feedforward value that is calculated from the flow-rate setting value, and the flow-rate simulation value output unit is configured to output the flow-rate simulation value in a state where a predetermined time delay exists with respect to the flow-rate setting value.