The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 25, 2018
Filed:
Sep. 18, 2015
Applicant:
Nhk Spring Co., Ltd., Yokohama-shi, JP;
Inventors:
Yoshio Yamada, Nagano, JP;
Kohei Hironaka, Nagano, JP;
Assignee:
NHK Spring Co., Ltd., Yokohama-shi, JP;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01R 1/067 (2006.01); G01R 1/073 (2006.01); H01L 21/00 (2006.01);
U.S. Cl.
CPC ...
G01R 1/07357 (2013.01); G01R 1/06722 (2013.01); G01R 1/07378 (2013.01); G01N 2201/00 (2013.01); H01L 21/00 (2013.01); H01L 2221/00 (2013.01);
Abstract
A probe unit according to the present invention is suitable for allowing a large current to flow. In the probe unit that accommodates a plurality of contact probes for electrically connecting an inspection target object and a signal processing device used to output an inspection signal, both ends of a large current probe () are electrically connected to electrodes of a contact target object, and a large current is made to flow via a metal block () that comes into contact with both end portions of the large current probe ().