The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Sep. 25, 2018

Filed:

Jul. 12, 2013
Applicant:

Applied Materials, Inc., Santa Clara, CA (US);

Inventors:

Gerd Hoffmann, Bruchkoebel, DE;

Sven Schramm, Kahl Am Main, DE;

Roland Trassl, Giessen, DE;

Assignee:

APPLIED MATERIALS, INC., Santa Clara, CA (US);

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C 16/448 (2006.01); C23C 14/24 (2006.01); C23C 14/00 (2006.01); C23C 14/08 (2006.01); C23C 14/56 (2006.01);
U.S. Cl.
CPC ...
C23C 16/448 (2013.01); C23C 14/0021 (2013.01); C23C 14/081 (2013.01); C23C 14/24 (2013.01); C23C 14/243 (2013.01); C23C 14/562 (2013.01);
Abstract

An evaporation apparatus for depositing material on a substrate by a drum is described. The evaporation apparatus includes a first set of evaporation crucibles aligned in a first line a first direction for depositing evaporated material on the substrate; a first gas supply pipe extending in the first direction being arranged between at least one of the evaporation crucibles of the first set of evaporation crucibles and the drum; and a second gas supply pipe extending in the first direction for providing a gas between the first set of evaporation crucibles and the drum with openings shaped and positioned to improve the uniformity of the deposition of the material.


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