The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Sep. 25, 2018

Filed:

Sep. 27, 2017
Applicant:

Toto Ltd., Kitakyushu-shi, Fukuoka, JP;

Inventors:

Hiroaki Ashizawa, Kitakyushu, JP;

Masakatsu Kiyohara, Kitakyushu, JP;

Assignee:

Toto Ltd., Fukuoka, JP;

Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
C04B 35/50 (2006.01); C04B 35/553 (2006.01); H01J 37/32 (2006.01); C04B 35/515 (2006.01);
U.S. Cl.
CPC ...
C04B 35/5156 (2013.01); H01J 37/32495 (2013.01); C04B 2235/445 (2013.01); C04B 2235/76 (2013.01); C04B 2235/781 (2013.01);
Abstract

According to one embodiment, a structure includes a polycrystalline substance of yttrium oxyfluoride as a main component. The yttrium oxyfluoride has a rhombohedral crystal structure, and an average crystallite size of the polycrystalline substance is less than 100 nanometers. When taking a peak intensity of rhombohedron detected near diffraction angle 2θ=13.8° by X-ray diffraction as r1, taking a peak intensity of rhombohedron detected near diffraction angle 2θ=36.1° as r2, and taking a proportion γ1 as γ1(%)=r2/r1×100, the proportion γ1 is not less than 0% and less than 100%.


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