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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 10081536 B1

PDFFull Text
Date of Patent:
Sep. 25, 2018

Filed:

Dec. 14, 2016

Gasses for increasing yield and reliability of mems devices

Applicant:

Texas Instruments Incorporated, Dallas, TX (US);

Inventors:

Simon Joshua Jacobs, Lucas, TX (US);

Molly Nelis Sing, Murphy, TX (US);

Assignee:

TEXAS INSTRUMENTS INCORPORATED, Dallas, TX (US);

Attorneys:

Michael A. Davis, Jr.

Charles A. Brill

Frank D. Cimino

Primary Examiner:

Dao H Nguyen

Int. Cl.
CPC ...
H01L 29/12 (2006.01); H01L 29/84 (2006.01); H01L 23/10 (2006.01); B81B 7/00 (2006.01); B81C 1/00 (2006.01); B81B 7/02 (2006.01); H01L 23/20 (2006.01); H01L 21/56 (2006.01); B29C 65/48 (2006.01); H01L 21/67 (2006.01);
U.S. Cl.
CPC ...
B81B 7/0038 (2013.01); B81B 7/02 (2013.01); B81C 1/00214 (2013.01); B81C 1/00285 (2013.01); H01L 21/56 (2013.01); H01L 23/10 (2013.01); H01L 23/20 (2013.01); H01L 29/12 (2013.01); H01L 29/84 (2013.01); B29C 65/48 (2013.01); B81B 2201/042 (2013.01); B81C 2201/11 (2013.01); H01L 21/67 (2013.01);
Abstract

In described examples, a MEMS device is enclosed within a sealed package including nonmetal oxide gasses at levels greater than 1% by volume. In at least one example, the MEMS device is protected against premature failure from various causes, including charging, particle growth and stiction by moieties of the nonmetal oxide gasses reacting with various exposed surfaces within the package of the MEMS device and/or the adsorbed water layers on said surfaces.

Find Patent Forward Citations

Jacobs, Simon. (2018). Gasses for increasing yield and reliability of mems devices (U.S. Patent No. 10081536). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/10081536

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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