The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 18, 2018
Filed:
Jun. 07, 2012
Moon Chul Lee, Yongin-si, KR;
IN Sang Song, Yongin-si, KR;
Duck Hwan Kim, Yongin-si, KR;
Chul Soo Kim, Yongin-si, KR;
Sang Uk Son, Yongin-si, KR;
Jea Shik Shin, Yongin-si, KR;
Ho Soo Park, Yongin-si, KR;
Jing Cui, Yongin-si, KR;
Moon Chul Lee, Yongin-si, KR;
In Sang Song, Yongin-si, KR;
Duck Hwan Kim, Yongin-si, KR;
Chul Soo Kim, Yongin-si, KR;
Sang Uk Son, Yongin-si, KR;
Jea Shik Shin, Yongin-si, KR;
Ho Soo Park, Yongin-si, KR;
Jing Cui, Yongin-si, KR;
Samsung Electronics Co., Ltd., Suwon-si, KR;
Abstract
A thin film bulk acoustic resonator and a method of manufacturing the same is disclosed. The thin film bulk acoustic resonator includes an acoustic resonator including a first electrode, a second electrode, and a piezoelectric layer disposed between the first electrode and the second electrode; an air gap disposed below the acoustic resonator and above a substrate to reflect the acoustic wave; and an anchor disposed on each of both surfaces of the air gap and having the same thickness as the air gap.