The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 18, 2018
Filed:
Dec. 21, 2012
Applicant:
Snaptrack, Inc., San Diego, CA (US);
Inventors:
Gilles Moulard, Munich, DE;
Paul Muralt, La Sarraz, CH;
Ramin Matloub, Pully, CH;
Thomas Metzger, Munich, DE;
Assignee:
SnapTrack, Inc., San Diego, CA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H03H 9/02 (2006.01); H01L 41/083 (2006.01); H01L 41/18 (2006.01); H01L 41/27 (2013.01); H03H 3/02 (2006.01); H03H 9/05 (2006.01); H03H 9/17 (2006.01);
U.S. Cl.
CPC ...
H01L 41/083 (2013.01); H01L 41/18 (2013.01); H01L 41/27 (2013.01); H03H 3/02 (2013.01); H03H 9/02015 (2013.01); H03H 9/0576 (2013.01); H03H 9/171 (2013.01); Y10T 29/43 (2015.01);
Abstract
A BAW component is provided. A method for manufacturing a BAW component is also provided. The component includes a bottom electrode, a top electrode and a first piezoelectric material. The first piezoelectric material is between the bottom electrode and the top electrode. The first piezoelectric material has a higher piezoelectric coefficient than AlN.