The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 18, 2018
Filed:
Oct. 27, 2015
Applicant:
Globalfoundries Inc., Grand Cayman, KY;
Inventors:
Jaime Bravo, Berkeley, CA (US);
Vikrant Chauhan, Clifton Park, NY (US);
Ryan Scott Smith, Clifton Park, NY (US);
Assignee:
GLOBALFOUNDRIES Inc., Grand Cayman, KY;
Primary Examiner:
Int. Cl.
CPC ...
G01R 31/26 (2014.01); G01R 31/28 (2006.01);
U.S. Cl.
CPC ...
G01R 31/2607 (2013.01); G01R 31/2601 (2013.01); G01R 31/2831 (2013.01); G01R 31/2884 (2013.01);
Abstract
Three reference resistors of the same resistance and a test structure are connected in a circuit having a Wheatstone Bride design. The circuit is electrically coupled between an input and ground. A voltage applied at the input resulting in an electrical characteristic difference between two midpoints of the circuit indicates the need for corrective action with respect to a design of the test structure for either OPC or etch bias.