The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 18, 2018
Filed:
Jun. 23, 2015
Analog Devices, Inc., Norwood, MA (US);
Jianglong Zhang, Vienna, VA (US);
Analog Devices, Inc., Norwood, MA (US);
Abstract
A teeter-totter type accelerometer includes one or more platforms configured so as to move in proportion to deformation of the substrate and/or anchor(s). The platform(s) may be in a fixed position relative to the substrate, e.g., by being fixedly attached to the anchor(s) or by being fixedly attached to the substrate, or the platform(s) may be movable relative to the substrate, e.g., by being tethered to the anchor(s) so as to allow the platform(s) to pivot relative to the anchor(s). Electrodes are placed on the substrate underlying the platform(s) for sensing position of the platform(s) relative to the underlying substrate. The teeter-totter proof mass is configured such that it can rotate relative to the platform(s), e.g., by being tethered to the platform(s) or by being tethered to one or more anchors separate from the platform(s). The output of the accelerometer is adjusted based on signals from these platform-sensing electrodes in order to reduce or eliminate offset drift.