The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 18, 2018
Filed:
Jun. 03, 2015
Applicant:
The Regents of the University of Michigan, Ann Arbor, MI (US);
Inventors:
Chinedum E. Okwudire, Ann Arbor, MI (US);
Deokkyun D. Yoon, Ann Arbor, MI (US);
Assignee:
The Regents of The University of Michigan, Ann Arbor, MI (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/67 (2006.01); F16M 11/04 (2006.01); F16M 11/18 (2006.01); G03F 7/20 (2006.01); G01N 21/95 (2006.01);
U.S. Cl.
CPC ...
F16M 11/043 (2013.01); F16M 11/18 (2013.01); G03F 7/709 (2013.01); H01L 21/67259 (2013.01); G01N 21/9501 (2013.01); G01N 2201/103 (2013.01);
Abstract
A magnet assisted stage system for scanning applications having a scanning table being moveable from a first position to a second position, a scanning actuator operably associated with the scanning table to move the scanning table along a scanning direction from the first position to the second position, and an actively variable magnetic spring system being operably augmented to the scanning table to exert a magnetic repulsion force upon the scanning table in the scanning direction.