The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Sep. 18, 2018

Filed:

Aug. 21, 2013
Applicant:

Hitachi Chemical Company, Ltd., Tokyo, JP;

Inventors:

Shunsuke Ueda, Ibaraki, JP;

Eisuke Haba, Tsukuba, JP;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C 14/34 (2006.01); C23C 14/22 (2006.01); C23C 14/14 (2006.01); C23C 14/00 (2006.01); C01B 32/162 (2017.01); C01B 32/16 (2017.01); B82Y 40/00 (2011.01); B82Y 30/00 (2011.01); B01J 37/34 (2006.01); B01J 37/02 (2006.01); B01J 23/745 (2006.01);
U.S. Cl.
CPC ...
C23C 14/223 (2013.01); B01J 23/745 (2013.01); B01J 37/0223 (2013.01); B01J 37/347 (2013.01); B82Y 30/00 (2013.01); B82Y 40/00 (2013.01); C01B 32/16 (2017.08); C01B 32/162 (2017.08); C23C 14/0036 (2013.01); C23C 14/14 (2013.01); C23C 14/34 (2013.01);
Abstract

Single walled carbon nanotubes can be synthesized and production efficiency of carbon nanotubes can be enhanced by a method including a supplying step (S) in which particulate carriers are supplied into a drum, a sputtering step (S) for supporting a catalyst, in which sputtering is performed while this drumis rotated around the axis and is swung so that one end portion and the other end portion in the axial direction of the drumare relatively vertically switched, and a recovering step (S) in which the particulate carriers are recovered by inclining the drum to discharge the particulate carriers from the drum.


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