The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 18, 2018
Filed:
Nov. 25, 2014
Applicant:
Agency for Science, Technology and Research, Singapore, SG;
Inventors:
Jinghui Xu, Singapore, SG;
Hongbin Yu, Singapore, SG;
Liang Lou, Singapore, SG;
Alex Yuandong Gu, Singapore, SG;
Assignee:
Agency for Science, Technology and Research, Singapore, SG;
Primary Examiner:
Int. Cl.
CPC ...
B06B 1/06 (2006.01); H01L 41/053 (2006.01); H01L 41/09 (2006.01); H01L 41/113 (2006.01); G10K 9/122 (2006.01);
U.S. Cl.
CPC ...
B06B 1/0644 (2013.01); B06B 1/0651 (2013.01); G10K 9/122 (2013.01); H01L 41/053 (2013.01); H01L 41/0973 (2013.01); H01L 41/1138 (2013.01); Y10T 29/42 (2015.01);
Abstract
A transducer is provided, which includes a substrate, wherein a cavity is defined at least partially through the substrate, at least one stopper structure arranged within the cavity, a support layer arranged over the at least one stopper structure and the cavity to seal the cavity, and a piezoelectric functional arrangement arranged on the support layer. According to further embodiments of the present invention, a method for forming a transducer is also provided.