The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 11, 2018
Filed:
Oct. 29, 2013
Applicant:
Oerlikon Surface Solutions Ag, Trubbach, Trubbach, CH;
Inventor:
Daniel Lendi, Grabs, CH;
Assignee:
OERLIKON SURFACE SOLUTIONS AG, PFÄFFIKON, Pfäffikon SZ, CH;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H02J 1/10 (2006.01); H02J 3/38 (2006.01); H02J 7/34 (2006.01); H02J 1/00 (2006.01); H01J 37/34 (2006.01); C23C 14/34 (2006.01); C23C 14/35 (2006.01);
U.S. Cl.
CPC ...
H02J 1/00 (2013.01); C23C 14/3464 (2013.01); C23C 14/3485 (2013.01); C23C 14/35 (2013.01); H01J 37/3444 (2013.01); H01J 37/3467 (2013.01);
Abstract
A power distributor that is capable of distributing the high power from a DC generator to more than two targets sequentially and without the power output of the DC generator being interrupted. Furthermore, the invention relates to a sputter source that includes the power generator described above.