The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 11, 2018
Filed:
Jun. 27, 2016
Applicant:
Tel Nexx, Inc., Billerica, MA (US);
Inventors:
Arthur Keigler, Wellesley, MA (US);
Freeman Fisher, Charlestown, MA (US);
Daniel Goodman, Lexington, MA (US);
Assignee:
TEL NEXX, INC., Billerica, MA (US);
Primary Examiner:
Int. Cl.
CPC ...
B65G 1/02 (2006.01); H01L 21/687 (2006.01); C25D 7/12 (2006.01); C25D 17/00 (2006.01); H01L 21/677 (2006.01);
U.S. Cl.
CPC ...
H01L 21/68721 (2013.01); C25D 7/12 (2013.01); C25D 17/001 (2013.01); C25D 17/005 (2013.01); H01L 21/67784 (2013.01); H01L 21/68742 (2013.01);
Abstract
Techniques herein provide a workpiece handling and loading apparatus for loading, unloading, and handling relatively flexible and thin substrates for transport and electrochemical deposition. Such a system assists with workpiece holder exchange between a delivery cartridge or magazine, and a workpiece holder. Embodiments include a workpiece handler configured to provide an air cushion to a given workpiece, and maneuvering to a given workpiece holder that can edge clamp the workpiece.