The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Sep. 11, 2018

Filed:

Jun. 26, 2015
Applicant:

Canon Kabushiki Kaisha, Tokyo, JP;

Inventors:

Takeshi Honma, Tokyo, JP;

Toshiki Ito, Kawasaki, JP;

Tomonori Otani, Kawasaki, JP;

Kazumi Iwashita, Kobe, JP;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B32B 3/00 (2006.01); G03F 7/00 (2006.01); B32B 3/30 (2006.01); B32B 7/12 (2006.01); B32B 27/30 (2006.01); B32B 27/16 (2006.01); B29C 35/08 (2006.01); H01L 21/027 (2006.01); H01L 21/308 (2006.01); H01L 21/266 (2006.01); C09J 5/06 (2006.01); C09J 4/06 (2006.01); G02B 1/04 (2006.01); B29K 33/00 (2006.01); B29K 105/00 (2006.01);
U.S. Cl.
CPC ...
G03F 7/0002 (2013.01); B29C 35/0805 (2013.01); B32B 3/30 (2013.01); B32B 7/12 (2013.01); B32B 27/16 (2013.01); B32B 27/308 (2013.01); C09J 4/06 (2013.01); C09J 5/06 (2013.01); G02B 1/04 (2013.01); H01L 21/0271 (2013.01); H01L 21/266 (2013.01); H01L 21/308 (2013.01); B29C 2035/0827 (2013.01); B29K 2033/08 (2013.01); B29K 2105/0002 (2013.01); B32B 2255/26 (2013.01); B32B 2457/08 (2013.01); B32B 2551/00 (2013.01);
Abstract

In nanoimprinting processes, photo-cured products often separate from the substrate and stick to the mold due to insufficient adhesion between the photo-cured product and the substrate. This causes a defect of pattern separation. An adhesion layer composition used for forming an adhesion layer between a substrate and a photocurable composition includes a compound (A) having at least two functional groups, and a solvent (B). The functional groups include at least one functional group capable of being bound to the substrate, selected from the group consisting of hydroxy, carboxy, thiol, amino, epoxy, and (blocked) isocyanate, and at least one hydrogen donating group as a functional group capable of being bound to the photocurable composition.


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