The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 11, 2018
Filed:
Apr. 24, 2015
Applicant:
Analog Devices, Inc., Norwood, MA (US);
Inventors:
Xin Zhang, Acton, MA (US);
Michael Judy, Ipswich, MA (US);
Assignee:
Analog Devices, Inc., Norwood, MA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01P 15/08 (2006.01); B81C 1/00 (2006.01); H01L 21/48 (2006.01); G01C 19/5769 (2012.01);
U.S. Cl.
CPC ...
G01P 15/0802 (2013.01); B81C 1/00261 (2013.01); G01C 19/5769 (2013.01);
Abstract
In one aspect, the disclosure is directed to a MEMS device. The MEMS device includes a silicon-based movable MEMS sensor element. The MEMS device also includes a plurality of wells formed into at least one surface of the movable MEMS sensor element. Each well is filled with at least one metal so as to increase the effective mass of the movable MEMS sensor element. The metal may be tungsten or tantalum, or an alloy with tungsten or tantalum.